Rebuild and Improve the Performance of Your Planar Magnetron Sputtering Cathode

Mark A. Bernick, Angstrom Sciences, Inc.

Planar magnetron sputtering cathodes are an integral part of most glass coating lines. It is inevitable that many sputtering cathodes will require repair or replacement at some point. In this paper, Angstrom Sciences presents a way to either repair or replace current planar cathodes and, at the same time, upgrade overall system performance. Data is provided that shows how the replacement magnet array offers performance advantages over the original magnet assembly by increasing target utilization and extending production run times.

This is accomplished in a cost effective way that minimizes downtime without effecting existing
process parameters.

Full-Text Article [106 KB]

The Authors

Mr. Mark Bernick Angstrom Sciences Inc. Read more