High Performing, Flexible and Comprehensive Rotating Cylindrical Sputter Hardware Solutions

Bob Lin

The main applications for large area glass coatings can be found in the architectural, automotive, display and PV industry (architectural and automotive being the more mature businesses while display and PV are fast growing new segments). In all of these application fi elds there is a strong evolution towards customization. In order for the customer to be able to produce his own unique product, application specifi c set-up and process tuning are key. The starting point to realize this are well chosen and fi t for use hardware components at each position in the coater.
Bekaert developed a series of fl exible and high performing sputter hardware components for rotating cylindrical magnetron applications. With these key components a customized and complete sputter solution can be worked out in close collaboration with the customer. Whether it concerns an existing coater in an upgrade/rebuild project or a new coater in a green field project, maximum flexibility can be offered for building in all critical components needed for sustaining a controlled process to realize high end products.
It is the scope of this paper to put this comprehensive and solution oriented approach into perspective of current evolutions in the coater business and present new and advanced sputter hardware components.

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