Process Technology for Modern Large Area Glass Coating

Ch Braatz, J Bruch, M Geisler, A Lopp, A Zmelty

The paper features advancements of an architectural glass horizontal coater concept which joins high product flexibility with high productivity, precise process management and ease of operation and maintenance. This highly modular glass coater is characterized by variable positions of gas separation
stages; by good process to process gas separation; further by each compartment can accommodate any one from the entire palette of process tools, like single or double planar or rotatable cathode, or plasma treatment sources, just as needed for the at-a-time-demanded process. Particular subject matter are improvements of the process control system achieved by the integration of a self learning reactive sputter process closed loop control, and by use of a new partial pressure sensor with no need for an additional turbo pump. Use of ceramic targets in place of metallic ones, as well as various DC-, MF-, and pulsed DC power applications are described. Coatings good optical quality from metallic or ceramic tar-gets will be discussed showing uniformity levels down to ± 1.0 % thickness variation over a glass width of 3.2 m. Long term process stability will be shown for a typical product. Also described is a new heat treatable silicon nitride based solar control coating.

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