A New Generation of In-line High Volume Production Systems for Low-defect Coating Applications

Mike Perata, Steven Nadel

Quality demands of growing markets such as automotive glazings, anti-reflection coatings and coatings for new display technologies are much more severe than traditional flat glass markets. Control of coating defects can be required for spots as small as 0.1 mm. Coating uniformity is typically required on complex three-dimensional substrates of widely varying curvatures. Special processing steps such as substrate heating and glow discharge treatments may be required to assure coating adhesion and performance.

These demands cannot be met in traditional, sputter-down horizontal glass coaters. As these new markets move from small batch into high volume production, a new generation of in-line high production sputter up and sputter vertical systems are required to meet these needs.

Design criteria and production results are presented for such systems that have been developed to meet the needs of the automotive glazing, CRT, flat panel display and advanced architectural glass markets. Flexible systems are capable of handling flat glass in stock sheet and cut sizes, as well as complex substrates such as windscreens. Implementation of rotatable magnetrons in DC and AC modes are presented for varying configurations. Production results for CRT and automotive glazing systems are shown.

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