Uniformity Control in Reactive Magnetron Sputtering

V. Bellido-Gonzalez, B. Daniel, Dr. D. Monaghan
Gencoa Ltd
J. Counsell, J.Counsell Ltd

Magnetron sputtering is an industrial coating deposition technique which is commonly used in glass coating industry in order to add functionality and properties to the base glass, properties such as antireflection, electrical conductivity, low emissivity are currently achieved thanks to magnetron sputtering. Reactive magnetron sputtering occurs when the deposited chemical composition of the coating substantially differs from the composition of the magnetron sputtering targets, (e.g. TiOx coatings deposited from Ti targets) or coating physicochemical properties differ much of the sputtered or co-sputtered target (e.g. high power ZnS). Up to a certain point magnetron sputtering has been a tolerated necessity. Glass Coating Industry has ‘opted-out’ on certain reactive sputtering processes in order to gain process stability and reproducibility. The use of compound targets has already been adopted, e.g. ITO, ZnO:Al; and more recently TiOx which has the potential of replacing Ti reactive sputtering. Most of these compound targets still would require a certain degree of reactive sputtering, especially for large area deposition requiring high coating uniformity. However, the general idea in those instances has been to limit the required control level to a minimum, almost entirely based on control of inputs rather than the monitoring of outputs. One of the key elements in maintaining a uniform reactive sputtering process over a large area under control, is the sensor or sensors which are used as reference in the closed loop control. The lack of stable sensors, and / or misuse or misplacement of sensors, has led the industry in many instances to take safer options. The present paper would try to highlight the current sensor availability with its pros and cons in large area uniform reactive magnetron sputtering deposition.

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The Authors

	Mr. Victor Bellido-Gonzalez R&D Manager GENCOA LTD Mr Víctor Bellido-González. Currently R&D Manager at Gencoa Ltd. BSc in Chemistry (Basque Country University, Spain, 1987). After his degree worked in the chemical industry. Continued after wi... Read more
	Dr. Dermot Monaghan Managing Director Gencoa Ltd. 1984-1988 BSc (Hons) Engineering Metallurgy. 1989- 1992 PhD as RA at Salford University, contract sponsored by Royal Armaments Research and Development Establishment, Fort Halstead, Kent. Subject; th... Read more