Reactively Sputtering High on the Transition Curve using a Few Inexpensive Components

John German, Doug Pelleymounter

Riding the "Sweet Spot" of the Transition Curve where reactive properties are achieved while getting higher deposition rates has been the goal for process engineers. There has been lots of time and many papers dedicated to discussion of this topic. These discussions have traditionally resulted in using expensive high tech equipment. Here is an example of a simple and inexpensive way to do the same thing.

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