Innovative Magnetron Sputter Solutions for Large Area Glass Coating Application

Wilmert De Bosscher, Krist Dellaert, Anja Blondeel, Hilde Delrue & Guy Gobin, Bekaert Advanced Coatings N.V.

Over the last few decades, magnetron sputtering has become one of the most important methods for depositing thin films. Some of the key features are: relative ease for up-scaling, high mass productivity (high deposition rate), good control of layer thickness, uniformity and quality, combined with a wide variety of available sputter materials. In addition, the number and magnitude of applications incorporating thin film technologies is growing rapidly. The main applications for large area glass PVD coatings can be found in the architectural, automotive and display industry.
In this paper, a complete system for large area sputter coating applications is presented, including all components needed for sustaining a controlled process. The system is based on the (dual) rotating cylindrical magnetron concept and includes rotating cylindrical target tubes, appropriate magnetron mechanics, adjustable magnet systems, advanced gas distribution systems and fast responding high-power electronics. The rotating cylindrical magnetron concept has proven to offer superior properties relative to the planar concept and satisfies most of the industrial requirements. Our latest developments and innovations in cylindrical sputter targets, enabling sputtering hardware and rotating magnetron systems will be discussed with regard to the ever increasing requirements for complex coating stacks.

Full-Text Article [120 KB]

The Authors