Application of Hot Isostatic Pressing to Rotatable Sputter Targets

Alan Plaisted, Soleras Ltd.
Joseph Runkle, UltraClad Corporation

The glass coating industry has applied several of the most advanced rotatable sputter target fabrication techniques. The Hot Isostatic Press (HIP) process is the most recent addition to the fabrication techniques used for rotary target manufacturing.

The HIP process uses nominal pressures of 5,000 to 15,000 psi and temperatures to above 2700°F. Combinations of pressure and temperature can create bulk assemblies of incompatible materials and eliminate voids to create a theoretical dense target.

Discussions and investigations of the void size that cause defects are not necessary due to near 100% dense targets. This same density property enhances heat transfer and allows increased power.

The projection of absolute cost benefit of a near perfect target body is difficult to measure in production with the many variables. Recent applications of HIP have demonstrated significant cost advantages.

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The Authors