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The right correlation between a fast operating, reliability, quality and yield effects to success of creation of competitive vacuum heat-saving coating on glass equipment.
This paper is devoted to equipment structural-layout optimization by productivity maximum criterion. The method of calculation and choice of conflict parameters: glass transfer speed and thin film deposition piece number (increase of fast operating and decrease of reliability) and load lock pumping speed (increase of fast-action and reliability but decrease of yield) as well is shown.
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Prof. Yuriy Panfilov
Professor Moscow Bauman State Technical University Professor of the Chair "Electronic Technology" of Moscow Bauman State Technical University. The main Scientific interest of Prof. Panfilov is thin film deposition technology and machinery. |